Thermally induced nanoscale structural and morphological changes for atomic-layer-deposited Pt on SrTiO3(001)
نویسندگان
چکیده
for atomic-layer-deposited Pt on SrTiO3(001) Zhenxing Feng, Steven T. Christensen, Jeffrey W. Elam, Byeongdu Lee, Mark C. Hersam, and Michael J. Bedzyk Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, USA Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439, USA X-ray Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA Department of Chemistry, Northwestern University, Evanston, Illinois 60208, USA Department of Physics and Astronomy, Northwestern University, Evanston, Illinois 60208, USA Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA
منابع مشابه
Nanoscale Structure and Morphology of Atomic Layer Deposition Platinum on SrTiO3 (001)
The early stages of nucleation and growth of atomic layer deposition (ALD) platinum on SrTiO3 (001) have been studied. Scanning electron microscopy reveals the ALD Pt deposits as discrete nanoparticles that grow and coalesce with increasing number of ALD cycles, ultimately resulting in a continuous film after ∼40 cycles. Atomic force microscopy shows the films to be fine-grained and highly conf...
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